液態鼓泡氣化供應系統
優點:

使用氣體(如H2)鼓泡汽化體(如TCS),在恒定的溫度和壓力下凝結該混合氣體,并以特定的濃度供應。

Use gas(e.g:xhydrogen)  babbling system Vaporize Liquid(e.g: TCS), condense this mixed gas at a constant temperature and pressure, and supply at the specified concentration.

應用:

蒸餾法高度純化High purification by distillation method

實現穩定濃度狀態下供應Supply at stable concentration

大幅減少待機時排氣Significant reduction of vent  gas at standby

1臺PGM可供應3個腔體Supplied to 3 chambers with 1 unit 

產品詳情

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